Silicon oxynitride layers Infrared spectroscopy RF MEMS capacitive switches MHD Simulation Recombinant proteins Dielectric materials Electrostatic actuators DsRed Dielectric charging KPFM Physico-chemical analysis SiO2 Nanomaterials Pulsed direct liquid injection Thin film coating Nanoparticules d'argent Plasma processes Fluorescence Safer-by-design Charge injection Pulsed gas injection Raman spectroscopy Fn Bolsig+ Kelvin Probe Force Microscopy Drops Space charge mitigation AFM Statistical analysis Dielectric Barrier Discharge AgNPs DBD Silver nanoparticles AgNps Plasma deposition Nanoparticles Thin SiO2 layers Adsorption Photoluminescence emission Silicon oxides PECVD SAB Nanostructured dielectrics Physico-chemical characterization Adsorption properties Red fluorescent proteins Space charge Nanotechnology Plasmas Electrical characteristics Silver nanoparticle Thin films Stability Aerosol BSA Break- ers Chemical analysis Electrode erosion Silicon nitride Proteins Coatings Kvaerner torch Dusty plasma Silicon nanoparticles Plasma process Silica Candida albicans Plasma Electric arcs Pulsed Direct Liquid Injection Electric Discharge Power Supply Time reversal Cytology Charge trapping Polyethylene Silver nanoparticles Silver Metal nanoparticles Dust HVDC MHD modeling Dielectric recov- ery Discharge in water Silver vapors Microwave plasma SiO2 thin layers Atmospheric pressure plasma Dielectric barrier discharge Metal oxide Characterization Ag nanoparticles Structural stabilities Optical emission spectroscopy Nanocomposite Laboratory astrophysics Silice Aerosols Thin SiOsub2/sub layers Nanocomposites Dielectric Couches minces